Sealed Waferholder

NB Technologies has designed a sealed wafer holder especially for electroplating and wet etching applications in microsystems technology and the semiconductor industry.

Applications:
- Wet chemical processes, e.g., etching
- Electroplating
- Anodization
- Porosification of silicon

Main benefits:
- Single side / backside dry processing
- Front or backside contact
- Temperature resistant up to 70°C
- Easy handling

Different versions for different wafer geometries:
- 100 mm, 150 mm, 200 mm SEMI standard
- Notch or flat
- 125 mm PV square
- 156 mm PV square
- or custom design

Materials:
- PEEK
- EPDM seals
- Titanium contacts

Outer dimensions (incl. handle):
- w 198 mm x l 25 mm x h 263 mm
- weight: 1,34 kg